- Analysis of Natural Frequency Dependency on Temperature Variation of MEMS Vibratory Gyroscope
- In this paper we present method of analysis natural frequencies on temperature variation for one of the most popular motion sensor – gyroscope. This complex modeling, simulation and results analysis include variation of crucial quantities like: particular geometrical dimensions, physical properties of material, spring constants and damping coefficients for both drive and sense directions. Authors present theoretical background of modelling process and mathematical formulas governing gyroscope operation and points out quantities dependent on temperature. Simulations were performed in two stages with two software environments: COMSOL and Matlab/SIMULINK. Two different geometries were considered: with common mass for both resonator and accelerometer and with separate inertial mass for sense direction.nnResults presented here and method of simulation can be very useful in further designing process of vibratory gyroscope operating in temperature variation environment (here between 293,15K and 393,15K) and improve performance by adjusting natural frequencies and Q factor.
- SEMI-THERM 35
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